Nikon innovates measurement speeds for the semiconductor and electronics industries

“We are delighted to introduce the NEXIV VMF-K Series, an industry-leading solution that addresses the growing needs for high-speed, finer measurement in semiconductor and electronic component manufacturing.”

by

Nikon unveils its new video measuring system, the NEXIV VMF-K Series. Designed with the semiconductor and electronics industries in mind, the new solution aims to improve measurement throughput and is ideal for applications including advanced packaging, substrate production, wafer inspection, and probe card inspection.

The new series includes the VMF-K3040, which replaces the VMZ-K3040, and the VMF-K6555, replacing the VMZ-K6555. As semiconductors continue to reduce in size, inspection has become more crucial to ensure quality assurance. Nikon’s new series helps provide stable measurements of micron-level dimensions while improving throughput. This helps support quality control levels, particularly within semiconductor device manufacturing.

Key benefits of the NEXIV VMF-K Series:

  • Greater measurement throughput: Providing 1.5 times (approx.) higher measurement throughput compared to its predecessor the VMZ-K model, helping to reduce measurement time while boosting productivity.
  • Enhanced optics: Featuring a confocal optical system, the solution provides simultaneous 2D and height measurement within the field of view.
  • Upgraded light source: With an LED confocal light source, the lifespan has increased from 3,000 hours (xenon lamps) to 30,000 hours. This should help to improve operational efficiency and reduce the need for replacements.
  • Expanded model line-up: The product family includes a standardised 45x objective lens model, enabling finer measurements.
  • SEMI S2/S8 compliance: The Series meets industry safety standards for semiconductor manufacturing equipment, following the SEMI S2/S8 guidelines.
  • New software function: Users can now display the remaining time during measurement processes.
  • Sleek design: The new design comes in black and silver tones.

“We are delighted to introduce the NEXIV VMF-K Series, an industry-leading solution that addresses the growing needs for high-speed, finer measurement in semiconductor and electronic component manufacturing,” said a Nikon spokesperson. “By significantly improving measurement throughput and maintaining high accuracy, our new system empowers manufacturers to enhance their quality control processes and accelerate product development in the face of increasing miniaturisation and integration of semiconductor devices.”