Advanced Energy provides high-accuracy, non-contact temperature measurement solution

“Our Sekidenko 4100T OFT provides a solution that does not require wafer contact and ensures high-accuracy measurements, even at relatively low temperatures.”

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Advanced Energy Industries is set to launch the latest version of its special materials pyrometer, the Sekidenko 4100T. This new version aims to provide high-accuracy, non-contact temperature measurement which will hopefully cater to the demands of next-generation semiconductor wage applications.

Process control in semiconductor manufacturing is simplified with precise, non-contact temperature measurement as it eliminates any reliance on less accurate estimates or simulations. The 4100T supports in-situ process monitoring and control by combining flexible, multi-channel measurement options with its redesign which aims to improve its performance while also making measurements at sub-250°C temperature ranges easier.

Key features of the Sekidenko 4100T:

  • Provides simultaneous, high-speed (1kHz) measurement up to four channels. 
  • Each channel can be configured independently, with wavelengths ranging from Ultraviolet to 2,300 nm. Temperature ranges can also span 60°C to 3,000°C. 
  • Improved flexibility allows for rapid measurements and optimisation on a variety of target materials, process temperature ranges and working distances. 
  • The system utilises fibre-based cables ensuring immunity to radio frequency and electromagnetic interference. 
  • An enhanced signal-to-noise ratio improves stability in applications where thermal radiation is limited.
  • Compatible with lensed optical sensors and sapphire light pipe sensors. 
  • Boasts an intuitive touch-screen interface, eliminating the need for a remote computer with access to all information and commands on a single screen. 
  • Finally, an integrated EtherCat interface simplifies integration into a full measurement and process control system.

“Temperature measurements based on thermocouples and other contact-based technologies significantly increase the potential for wafer damage and contamination, while non-contact approaches such as simulation and estimating tools are inaccurate,” said Dhaval Dhayatkar, Vice President, Critical Sensing and Control, Industrial Power Products at Advanced Energy. “Our Sekidenko 4100T OFT provides a solution that does not require wafer contact and ensures high-accuracy measurements, even at relatively low temperatures, giving manufacturers the data they need to optimise process efficiency, product quality and yield.”